Excimer Laser Annealing System for High-resolution Panels
Excimer Laser Annealing (ELA) system converts amorphous silicon layer on a glass substrate to poly-silicon one, which is generally used in TFT (Thin Flat Transistor) of the high-resolution panels. ELA System is essential for the production of high-resolution panels, such as smartphones, digital cameras and portable gaming devices.
Since 1995, we have sold over 200 systems to display companies in Japan, South Korea, Taiwan, China and Singapore, as one of the top manufacturers of ELA system.
- Available for the largest glass substrate
- Extention of process margin : Pulse Extender, improvement of ununiformity (mura) and mitigation of pulse fluctuation
- Reduction of maintenance cost : Extention of tube life time
- Inhabitation of vibration
- Introduction of the new control system : improvement of energy stability and operatability