Excimer Laser Annealing System for High-resolution Panels

YIELDSCAN ™ ELA

Excimer Laser Annealing System for High-resolution Panels

Excimer Laser Annealing (ELA) system converts amorphous silicon layer on a glass substrate to poly-silicon one, which is generally used in TFT (Thin Flat Transistor) of the high-resolution panels. ELA System is essential for the production of high-resolution panels, such as smartphones, digital cameras and portable gaming devices.

 

Sales Records

Since 1995, we have sold over 200 systems to display companies in Japan, South Korea, Taiwan, China and Singapore, as one of the top manufacturers of ELA system.

Features

  • Extentionof process margin : Pulse Extender, improvement of ununiformity(mura) and mitigation of pulse fluctuation
  • Reduction of maintenance cost : Extentionof tube life time
  • Anti-vibration structure
  • High process performance with “ ⇨ StiFloat™ ” technology.
  • ImprovedProduction capacity(25% Up) and CoO(20% Down) with multiple cycle handling operation.
  • Yield Up: Self-monitoring with data integration and analysis system(iSCAN™)

Excimer Laser Annealing System
(Gen 6)

Excimer Laser Annealing System
(Gen 4)

Excimer Laser Annealing SystemforHigh-resolution Panels line up

System Line up