Laser Lift-Off System

YIELDSCAN ™ LLO

Sales Records

Delivered to display companies in Japan, South Korea, Taiwan, China for manufacturing flexible display.

Features

  • Original stage technology brings high production capacity.(50% Up ※1)
  • Available Excimer(308nm) and DPSS(308nm)
  • Process monitoring system( judgement: debondedor not )
  • Turnkey operation (Automaticirradiation conditionsettingby AI ※2)
  • Small footprint(40% smaller ※3 )
FPD用レーザ剥離装置

Laser Lift-Off System
(Gen 6 Half)

Laser Lift-Off System Line up

System Line up

※1  Depending on overlap rate.

※2  Process judgement is done with deep learning. Pictures of customer’s panel after LLO is needed.

※3  Comparison data between G6H systems.