YIELDSCAN ™ LLO
Delivered to display companies in Japan, South Korea, Taiwan, China for manufacturing flexible display.
- Original stage technology brings high production capacity.(50% Up ※1)
- Available Excimer(308nm) and DPSS(308nm)
- Process monitoring system( judgement: debondedor not )
- Turnkey operation (Automaticirradiation conditionsettingby AI ※2)
- Small footprint(40% smaller ※3 )
Laser Lift-Off System
(Gen 6 Half)
※1 Depending on overlap rate.
※2 Process judgement is done with deep learning. Pictures of customer’s panel after LLO is needed.
※3 Comparison data between G6H systems.